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The correct information is displayed below. We know you love to play games and watching. We have the best games collection from all over the internet.Methods for manufacturing a ferroelectric thin film will be described. The bulk crystal of PZT (p-type cation-exchange-type perovskite crystal BaTiO3) has a high Curie temperature (about 1050° C.) and is highly piezoelectric. In addition, it has been well known that it has favorable properties as an excellent ferroelectric material, and its piezoelectric constant d33 is about 800 pC/N and the leakage current ratio is less than 109 at 77° K. For the reasons, it is expected that the PZT crystal is applied to various piezoelectric devices.
It is generally said that the material, in which the perovskite is formed on a perovskite substrate, has a small lattice mismatch to the substrate, and it has the maximum piezoelectric constant and the maximum ferroelectricity at a crystal temperature of about 500° C. to 700° C. and that this temperature is near the sintering temperature of the material, and it is very important to form this ferroelectric thin film at this temperature. For example, when the crystal of the thin film is manufactured by sputtering, the temperature is about 500° C., and it is necessary to heat the substrate at that temperature to form a sintered thin film.
The PZT thin film formed in this manner has been used in a wide range, such as a piezoelectric actuator and a transducer to record signals. It is generally known that the thin film formed by sputtering has a perovskite structure, and it has been also generally known that this thin film has a high piezoelectric constant of about 2,000 pC/N at a crystal temperature of about 500° C. to 700° C.
Recently, it has been expected that a ferroelectric material having a good ferroelectricity at a low crystal temperature (e.g., 100° C. or less), such as SrBi2Ta2O9 (SBT), a thin film formed on an SOI (Silicon On Insulator) substrate, is used for a micro-motion actuator and a micro-processor, a large memory, a high

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