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In forming the trenches, an etching step that is conducted in a corrosive environment is employed. A significant cause of wafer breakage during the etching process is the formation of cracks in the wafer. A wafer will normally contain one or more processing regions in which it is desirable to stop or to terminate the etching process. These regions are called endpoints.
One approach to preventing wafer breakage during the etching process is to place a protector over the wafer during the etching process. For example, when the wafer is being etched with a mixture of a gas and an additive, a protector is typically placed on the wafer. The additive in the gas reacts preferentially with the substrate material at the bottom of the trench, providing a more uniform etch profile and providing a more even spacing of the raised lines of the photoresist, increasing the dimensional accuracy of the trenches.
In forming the protector, a layer of phot
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Raymond E. Feist: A Darkness at Sethanon PDF. The available paperback editions of A Darkness at Sethanon are all out of print. If you want to read A Darkness at Sethanon in the original book, with the same typography as the author used in the printing process, I suggest using the book by Raymond E. Feist (ISBN 9780062074371) as a substitute. This book offers a thorough lexical description of an English for Specific.
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